Focused-ion-beam directed self-assembly of Cu2O islands on SrTiO3(100)
作者： Y. Du , S. Atha , R. Hull , J. F. Groves , I. Lyubinetsky
DOI: 10.1063/1.1765212
关键词:
摘要: Nanoscale islands of Cu2O have been synthesized on single-crystal SrTiO3 (100) substrates using oxygen plasma-assisted molecular-beam epitaxy (MBE). Island growth location has controlled by an ex situ Ga+ focused ion beam (FIB) to modify the surface in discrete locations prior island synthesis. The FIB modifications generated topography with lateral dimensions 150–200nm. Ex atomic force microscopy study after reveals that certain substrate modification and MBE condition combinations lead directed self-assembly metal oxide at edges modified zones.
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