作者: Yingge Du , James F. Groves , Igor Lyubinetsky , Donald R. Baer
DOI: 10.1063/1.2364038
关键词: Substrate (electronics) 、 Self-assembly 、 Materials science 、 Nanotechnology 、 Nucleation 、 Molecular beam epitaxy 、 Single crystal 、 Crystal growth 、 Quantum dot 、 Focused ion beam
摘要: Cu2O quantum dots (QDs) have been synthesized on single crystal SrTiO3 (100) substrates with focused ion beam (FIB) modification using oxygen plasma-assisted molecular epitaxy. In a set of experiments, QD growth location has controlled FIB implants to modify the surface in discrete locations prior dot synthesis. Atomic force microscopy used characterize this directed self-assembly oxide QDs. QDs observed form first generated features, filling those features before additional nucleated neighboring, unmodified regions. The nature modified is compared grown substrate While provides lateral control over QDs, formed undamaged surfaces were more uniform shape and size than that produced pits.