Rapid fabrication of nanoneedle arrays by ion sputtering.
作者： Yi-Zhong Huang , David J H Cockayne , Jausovec Ana-Vanessa , Russell P Cowburn , Shou-Guo Wang
DOI: 10.1088/0957-4484/19/01/015303
关键词:
摘要: We report a novel method for rapidly fabricating ordered nanoneedles using an ion beam that cuts through the Fe/GaAs single thin layer or Fe/MgO/Fe/GaAs multilayer producing pillar pattern followed by raster-scanning normal to patterned area. However, such were not formed on pure GaAs substrate surface without Fe film coating, nor coated with Cr epitaxial film, when this was used. It has advantages over other methods, being simple, fast and well controlled one-dimensional nanostructure arrays, leading range of applications as high aspect ratio sharp tips atomic force microscope/atom probes consequent possible quantum confinement effects arrays nanostructures field-optical/photoluminescence emission data recording.
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