Probe head, probe card assembly using the same, and manufacturing method thereof
作者： Wen-Feng Liao , Yuan-Pin Huang , Ming-Cheng Hsu , Wen-Tsai Su
DOI:
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摘要: A probe head includes a first substrate, second spacer, at least one probe, and an insulating material. The substrate has through hole. spacer is disposed between the substrate. together form cavity. in cavity protrudes from hole material on partially
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