Combined probe head for a vertical probe card and method for assembling and aligning the combined probe head thereof
作者： Chao-Ching Huang , Chiu-Chu Chang , Wen-Chi Chen
DOI:
关键词: Computer hardware 、 Probe card 、 Acoustics 、 Materials science
摘要: A combined probe head being disposed in a space transformer of vertical card is provided, which the used for differentiating or segmenting layout area probes card. The may include locating plate and sub-probe heads. fixed portions. Each corresponding sub-dies inserted between sub-dies, each assembled portion. Therefore, can be respectively differentiated segmented from heads order to avoid mutual interference under repair process. In addition, related method assembling aligning above mentioned provided.
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