Outside chamber sealing roller system for surface treatment gas reactors
作者： Ferencz S. Denes , Robert J. Sandberg
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摘要: A surface treatment gas reactor features a roller assembly for transporting bi-dimensional material into and out of reaction chamber. Either four-roller or three-roller may be employed. The is configured such that the area rollers in which are exposed to interior chamber minimized. Thus, most located outside Active volume reduced minimum by large freely rotating specially shaped support piece mounted occupy dead substrate treated transported system through plasma generated electrodes removable electrode holder within Axial ends sealed with contact. channeling mechanism employed avoid displacement being during evacuation
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