Method for fabricating ultra thin single-crystal metal oxide wave retarder plates and waveguide polarization mode converter using the same
作者： Richard M. Osgood , Miguel Levy , Antonije M. Radojevic
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摘要: A method for fabricating ultra-thin single-crystal metal oxide wave retarder plates, such as a zeroth-order X-cut LiNbO3 half-wave plate, comprises ion implanting bulk birefringent crystal at normal incidence through planar major surface thereof to form damage layer predetermined distance d below the surface, and detaching plate from by either chemically etching away or subjecting having rapid temperature increase effect thermally induced snap-off detachment of plate. The detached has thickness dependent on implantation energy. fabricated in accordance with this may be used conjunction an optical waveguide section TE-TM polarization mode converter mounting groove perpendicular direction propagation therein, bonding back-end facet front-end section. In each case axes is 45° respect electric field vector TE TM
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