Thin film transistor with excellent stability for liquid crystal display

作者: Kesao Noguchi

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摘要: The thin-film transistor for liquid crystal display according to the present invention has an inverted-staggered structure in which source and drain electrodes are formed above a gate electrode on glass substrate, comprises nondoped amorphous silicon film as channel region just electrode, borosilicate film. Preferably, further includes nitride over

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