A scanning probe microscope having automatic probe exchange and alignment

摘要: A scanning probe microscope and method having automated exchange precise alignment of probe, wherein one or more additional stored probes (4) for installation onto a mount (32) are in storage cassette (22) wafer, selected is aligned to detection system (11), the then clamped against mount. Clamping performed using clamp (68) which disabled when removing replacement from cassette, enabled installing on releasing at later time subsequent exchange. Probe signal by determining positioning pattern recognition processing image allow removal without operator intervention. Techniques error checking employed ensure proper operation.