Method of manufacturing a waveguide optical semiconductor device
作者： Koji Yamada
DOI:
关键词:
摘要: A method of manufacturing a waveguide optical semiconductor device provides substrate including lower clad layer, core an upper layer and contact formed on the in order. The part are removed by dry etching between pair parallel line patterns at independent rectangular pattern located near patterns. Then, remaining is wet so as to expose within pattern. An insulating material coated exposed layer. region that exposed. electrode Finally, bonding pad over
lens.org 参考文章(14)
Takashi Iwasaki, Method of processing an epitaxial wafer of InP or the like ,(1996)
Y. Noda, M. Suzuki, Y. Kushiro, S. Akiba, High-speed electroabsorption modulator with strip-loaded GaInAsP planar waveguide Journal of Lightwave Technology. ,vol. 4, pp. 1445- 1453 ,(1986) , 10.1109/JLT.1986.1074650
Frank Thomas John Smith, Process for forming a positive index waveguide ,(1986)
Koji Yamada, Koji Nakamura, Ridge waveguide-type optical semiconductor device and method of fabricating the same ,(1998)
Ang Seo Kim, Don Soo Kim, Young Kun Sin, Sang Yong Lee, Laser diode and method for fabricating the same ,(1996)
Ang-Seo Kim, Method of fabricating a reverse mesa ridge waveguide type laser diode ,(1997)
Masahiro Aoki, Hiroshi Sato, Makoto Suzuki, Masaaki Komori, Semiconductor guided-wave optical device and method of fabricating thereof ,(1996)
Kazuhisa Takagi, Keisuke Matsumoto, 和久 高木, 啓資 松本, Modulator and semiconductor laser device with modulator and method for manufacturing the same ,(1999)
Nakamura Koji, Yamada Mitsushi, Horikawa Hideaki, RIDGE WAVEGUIDE TYPE SEMICONDUCTOR OPTICAL FUNCTION ELEMENT AND PRODUCTION THEREOF ,(1999)
Kitamura Shotaro, Atsui Oaki, OPTICAL MODULATOR AND ITS MANUFACTURE ,(1995)