Effect of internal stress on adhesion and other mechanical properties of evaporated indium tin oxide (ITO) films
作者： S. Suzuki , N. Hashimoto , T. Oyama , K. Suzuki
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摘要: The relationship between various mechanical properties of evaporated indium tin oxide (ITO) films has been investigated. hardness and internal stress were found to be correlated. This correlation can expressed as a linear expression similar that reported for bulk material. strength adhesion the substrate was observed related stress. also could well interpreted quantitatively by assuming stored elastic energy in ITO constant during peeling. coefficient kinetic friction not any property. It depended only on roughness film surfaces. A series Taber abrasion tests revealed most important durability among factors such hardness, adhesion, strength, friction.
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