Mechanical properties of r.f. magnetron sputtered indium tin oxide films
作者： Wen-Fa Wu , Bi-Shiou Chiou
DOI: 10.1016/S0040-6090(96)09105-5
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摘要: Abstract In this study, the mechanical behavior of r.f. magnetron sputtered indium tin oxide (ITO) films with glass and polycarbonate as substrates was investigated. The microhardness, pull-off strength scratch adhesion were measured to assess film properties. ITO coating improves hardness substrate. Incorporation oxygen in sputtering ambient enhances crystallization film; consequently, coated are improved. thermal expansion mismatch between results poor when is employed
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