Investigation of mechanical properties of transparent conducting oxide thin films
作者： Kaiyang Zeng , Furong Zhu , Jianqiao Hu , Lu Shen , Keran Zhang
DOI: 10.1016/S0040-6090(03)00915-5
关键词:
摘要: We present an analysis of the mechanical properties transparent conducting oxide (TCO), indium tin (ITO) and zinc (IZO) thin films on glass substrates. The ITO IZO were deposited by radio frequency magnetron sputtering at a low processing temperature. elastic modulus hardness TCO prepared different deposition conditions are determined nano-indentation experiments. results show that presence hydrogen in gas mixture during film could vary significantly films. However, similar found to be less sensitive used deposition. correlation between moduli porosity ceramic materials is determine thus prepared. It can changed approximately 9%, when mixture.
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