Selective gas detection using uncoated SAW delay lines
作者： M. Penza , V.I. Anisimkin , S.A. Maximov , L. Vasanelli
DOI: 10.1016/S0925-4005(97)00191-3
关键词:
摘要: Abstract Two approaches for gas recognition in binary mixtures have been developed imcoated surface acoustic wave (SAW) sensors based on thermal conductivity principle. The first approach utilizes the difference of ambient atmosphere with respect to a reference as general property test responses sensing elements. Selecting operating temperature and gas, single is distinctly detected. second inherent SAW devices, whose response monitored by coefficient delay (TCD). Choosing substrate material, rejected. Experimental measurements are shown discussed.
elsevier.com
sci-hub.se 参考文章(6)
G.W. Watson, R.D. Ketchpel, E.J. Staples, Thermal conductivity gas sensor based on LiNbO/sub 3/ SAW resonators internaltional ultrasonics symposium. pp. 253- 256 ,(1992) , 10.1109/ULTSYM.1992.276025
V.I. Anisimkin, M. Penza, S.A. Maksimov, L. Vasanelli, SAW delay lines for thermal detection of gases and gas flows internaltional ultrasonics symposium. ,vol. 1, pp. 481- 484 ,(1995) , 10.1109/ULTSYM.1995.495624
J.F. Diaz, H.E. Karrer, J.A. Kusters, J.H. Matsinger, M.B. Schulz, The Temperature Coefficient of Delay-Time for X-Propagating Acoustic Surface-Waves on Rotated Y-Cuts of Alpha Quartz IEEE Transactions on Sonics and Ultrasonics. ,vol. 22, pp. 46- 49 ,(1975) , 10.1109/T-SU.1975.30774
G. Watson, E. Staples, SAW resonators as vapor sensors IEEE Symposium on Ultrasonics. pp. 311- 314 ,(1990) , 10.1109/ULTSYM.1990.171375
V.I. Anisimkin, M. Penza, V.A. Osipenko, L. Vasanelli, Gas thermal conductivity sensor based on SAW IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 42, pp. 978- 980 ,(1995) , 10.1109/58.476539
Robert C. Weast, CRC Handbook of Chemistry and Physics ,(1973)