Tungsten microcone growth by laser irradiation

作者: Yuji Kawakami , Eiichi Ozawa

DOI: 10.1016/S0169-4332(03)00615-9

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摘要: Abstract Nanosecond pulsed-Nd:YAG laser irradiation of a target material with second-harmonic waves (wavelength=532 nm) under various gas atmospheres resulted in the formation tungsten microcone arrays high aspect ratio protruding from initial surface material. The peak fluence was changed 3.0 to 19.1 J/cm2. A substrate irradiated between 1 and 48 000 shots. number shots strongly influenced growth morphology microcones: several tens or hundreds pulses created only rough surfaces, further microcones. microcones grew heights up 20 μm narrowed tips about 1.5 μm diameter. Our observations reveal that can be generated ambient gases. We experimentally evaluated order determine mechanism helium, SF6, air. appears function repeated melting solidification structures by pulsed on top surface. depends atmosphere used.

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