SUBSTRATE TREATMENT SYSTEM

摘要: PROBLEM TO BE SOLVED: To enable easy obtaining of symmetrical fluid movement within a bath even when work error exists in nozzle. SOLUTION: Reflection boards 40 are provided between nozzles 20 on both sides and the bottom surface water-washing WB1. On grooved portion 40b reflection board 40, plurality grooves 41 at positions corresponding to spacing substrates 1. Pure water ejected toward WB1 from hits is thus split, with part thereof flowing along substrate The flows join center WB1, wash If not symmetrical, position attitude adjusted secure symmetry.