Three-dimensional STEM for observing nanostructures

摘要: A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens 3D-observation were prepared by a microsampling technique using focused ion beam. Copper via-holes semiconductor memory device and ZnO particles observed the 3D-STEM from different directions, 3D-data successfully reconstructed in topography mode.