Nano-dimensional analysis for practical materials using the nano-beam SIMS apparatus
作者： M. Nojima , M. Toi , A. Maekawa , B. Tomiyasu , T. Sakamoto
关键词:
摘要: We have been developing the nano-beam secondary ion mass spectrometry (SIMS) apparatus, which can realize high spatial resolution and efficiency of detection. In this paper, SIMS method was introduced for purpose characterization practical materials: contact holes. Contrasts induced electron (ISE) image (ISI) were different. The difference discussed with respect to information depth chemical sensitivity. Elemental maps obtained nano-dimension provided many aspects sample. [DOI: 10.1380/ejssnt.2004.131]
sci-hub.st 参考文章(7)
M Nojima, B Tomiyasu, Y Kanda, M Owari, Y Nihei, Nanoscale SIMS analysis: the next generation in local analysis Applied Surface Science. pp. 194- 197 ,(2003) , 10.1016/S0169-4332(02)00753-5
Y. Sakai, T. Yamada, T. Suzuki, T. Sato, H. Itoh, T. Ichinokawa, Contrast mechanisms in scanning ion microscope imaging for metals Applied Physics Letters. ,vol. 73, pp. 611- 613 ,(1998) , 10.1063/1.121872
Naokatsu Ikegami, Atsushi Yabata, Guo Lin Liu, Hidetsugu Uchida, Norio Hirashita, Jun Kanamori, Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range Japanese Journal of Applied Physics. ,vol. 37, pp. 2337- 2342 ,(1998) , 10.1143/JJAP.37.2337
Keizo Yamada, Toyokazu Nakamura, Tohru Tsujide, An in-line process monitoring method using electron beam induced substrate current Microelectronics Reliability. ,vol. 41, pp. 455- 459 ,(2001) , 10.1016/S0026-2714(00)00204-3
Bunbunoshin Tomiyasu, Isamu Fukuju, Hirotaka Komatsubara, Masanori Owari, Yoshimasa Nihei, High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS) Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 136, pp. 1028- 1033 ,(1998) , 10.1016/S0168-583X(97)00790-8
M. Koguchi, H. Kakibayashi, R. Tsuneta, M. Yamaoka, T. Niino, N. Tanaka, K. Kase, M. Iwaki, Three-dimensional STEM for observing nanostructures Journal of Electron Microscopy. ,vol. 50, pp. 235- 241 ,(2001) , 10.1093/JMICRO/50.3.235
Bunbunoshin TOMIYASU, Soh SAKASEGAWA, Takamitsu TOBA, Masanori OWARI, Yoshimasa NIHEI, Improvement on the Shave-off Depth Resolution in a Submicron SIMS Analysis Hyomen Kagaku. ,vol. 20, pp. 523- 529 ,(1999) , 10.1380/JSSSJ.20.523