作者: Ki Chul Kim , Hye Jin Kim , Sang Hyeob Kim
DOI:
关键词:
摘要: Provided are a structure for an optical device and method of fabricating the same. The includes: light scattering layer producing nanoparticles due to externally provided thermal energy; protective protecting layer; capping disposed between layer. As is formed nitride-oxide, energy gap increased make suitable high-speed electronic circuit, desired stoichiometric ratio can be easily obtained. Also, prevents crystalline mismatch, thus non-uniformity elements inhibited maintain state. result, high-integrated which excellent in uniformity reproducibility, embodied.