Prevention of Resist Pattern Collapse by Resist Heating during Rinsing
作者： Toshihiko Tanaka , Mitsuaki Morigami , Hiroaki Oizumi , Takashi Soga , Taro Ogawa
DOI: 10.1149/1.2059382
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摘要: A novel resist hardening method is discussed for preventing pattern collapse (bending and breaking). In this method, a cross-link-type chemically amplified heated during rinsing. This heating increases the cross-link ratio of resist, thus before drying. Using critical aspect 0.15 μm line space patterns improved from 5 to 6.7
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