Process for producing a large area solid state radiation detector
作者： Nang T. Tran
DOI:
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摘要: A process for producing an array of solid state radiation detectors includes depositing on a substrate one or more layers silicon-based materials and then metal layer overlying substance. The is formed into regions, the used as mask to remove exposed adjacent substance thereby forming that are aligned with photosensitive sensing devices. present invention reduces number microlithography steps in layered amorphous silicon
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