Hybrid organic-inorganic planar optical waveguide device
作者： Robert D. Shoup , Ronald E. Johnson , Richard O. Maschmeyer , Steven B. Dawes
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摘要: A planar optical device is formed on a substrate (12) and comprising an array of waveguide cores (14) cladding layer (16) contiguously with the cores. At least one inorganic-organic hybrid material that comprises extended matrix containing silicon oxygen atoms at fraction being directly bonded to substituted or unsubstituted hydrocarbon atoms. In accordance other embodiments invention, method forming steps preparing core composition precursor material; partially hydrolyzing polymerizing under conditions effective form
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