Ultrasonic Energy Characteristics of ZnO Piezoelectric Thin Films Array Based on MEMS
作者： Shao Hua Wu , Zhong Hua Gao , Zhan Zhao , Li Xiao , Yun Dong Xuan
DOI: 10.4028/WWW.SCIENTIFIC.NET/KEM.562-565.1263
关键词:
摘要: The characteristics of the ultrasonic energy transference system with MEMS ZnO square piezoelectric thin films array (SPTFA) structure has been investigated in article. Design principle introduced, and directivity enhanced by structure. silicon panel SPTFA successfully fabricated based on technology. experiment carried out as well order to check capability means two panel. Experiment results show that maximum power density is 2.581mW/cm2 when amplitude exciting voltage 10V, light emitting diode lightened a distance 3mm.
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