Coupling of MEMS ultrasonic transducers
作者： D.W. Greve , I.J. Oppenheim
DOI: 10.1109/ICSENS.2003.1279056
关键词:
摘要: MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these is their wide bandwidth together with the potential for economical fabrication detector arrays. In this paper, we discuss issues related to coupling solid liquid media. We will show that appropriate choice medium thickness required order prevent spurious pulses.
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