Surface analysis of wide gap insulators with XPS
作者： F. Bart , M.J. Guitteta , M. Henriot , N. Thromata , M. Gautier
DOI: 10.1016/0368-2048(94)02191-2
关键词:
摘要: Abstract The positive surface charge induced by the photoelectron emission is a major problem in XPS study of insulating materials. This paper devoted to definition an experimental procedure for analysis large gap oxides, three which are considered: sapphire, quartz and yttria-doped-zirconia, their widths being respectively about 8.5, 9 5.5 eV. influence substrate temperature on first described. compensation then studied using low energy electron bombardment (flood gun), was calibrated prior experiments; reliability reproducibility results (peak positions, FWHM intensity) discussed. question Fermi edge referencing materials, as well role potential neutralization conditions its possible use material outlined. last section establishes set technical recommendations insulators, pointing out criteria be chosen optimizing flood gun settings.
elsevier.com
sci-hub.se 参考文章(25)
R.T. Lewis, M.A. Kelly, Binding-energy reference in X-ray photoelectron spectroscopy of insulators Journal of Electron Spectroscopy and Related Phenomena. ,vol. 20, pp. 105- 115 ,(1980) , 10.1016/0368-2048(80)85010-9
F. Bart, M. Gautier, J.P. Duraud, M. Henriot, (011̄0) α-quartz surface: a LEED, XANES and ELS study☆ Surface Science. ,vol. 274, pp. 317- 328 ,(1992) , 10.1016/0039-6028(92)90837-V
T. Dickinson, A.F. Povey, P.M.A. Sherwood, Differential sample charging in ESCA Journal of Electron Spectroscopy and Related Phenomena. ,vol. 2, pp. 441- 447 ,(1973) , 10.1016/0368-2048(73)80034-9
A.E. Hughes, B.A. Sexton, Comments on the use of implanted Ar as a binding energy reference Journal of Electron Spectroscopy and Related Phenomena. ,vol. 50, pp. C15- C18 ,(1990) , 10.1016/0368-2048(90)87080-8
L. T. Weng, G. Vereecke, M. J. Genet, P. Bertrand, W. E. E. Stone, Quantitative XPS. Part I: Experimental determination of the relative analyser transmission function of two different spectrometers — a critical assessment of various methods, parameters involved and errors introduced Surface and Interface Analysis. ,vol. 20, pp. 179- 192 ,(1993) , 10.1002/SIA.740200302
D.A. Stephenson, N.J. Binkowski, X-ray photoelectron spectroscopy of silica in theory and experiment Journal of Non-crystalline Solids. ,vol. 22, pp. 399- 421 ,(1976) , 10.1016/0022-3093(76)90069-7
P. Ascarelli, G. Moretti, Ionicity of metallic oxide surfaces on metals as observed by Auger (XPS) spectroscopy Surface and Interface Analysis. ,vol. 7, pp. 8- 12 ,(1985) , 10.1002/SIA.740070103
H. Gonska, H.J. Freund, G. Hohlneicher, On the importance of photoconduction in ESCA experiments Journal of Electron Spectroscopy and Related Phenomena. ,vol. 12, pp. 435- 441 ,(1977) , 10.1016/0368-2048(77)85094-9
Tery L. Barr, Studies in differential charging Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 7, pp. 1677- 1683 ,(1989) , 10.1116/1.576069
H. Mizuno, M. Morifuji, K. Taniguchi, C. Hamaguchi, Theoretical calculation of impact ionization rate in SiO2 Journal of Applied Physics. ,vol. 74, pp. 1100- 1105 ,(1993) , 10.1063/1.354959