Surface processing method and surface processing apparatus
作者： Eisuke Morisaki , Masaki Narushima , Masayuki Harashima , Noriaki Toyoda , Isao Yamada
DOI:
关键词:
摘要: A disclosed surface processing method includes a first step, wherein gas cluster beam is generated from source material that does not contain nitrogen, and irradiated to member be processed, second nitrogen the processed.
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