Hot embossing lithography method
作者： Tai-Cherng Yu
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摘要: A hot embossing lithography method includes the steps of: providing a press mold ( 20 ) having surface, surface pattern defined therein; substrate 10 ′) polymer thin film 30 formed thereon; aligning with film; introducing vapor to moisten for lowering adsorption energy of surface; heating temperature above glass transition film, thereby softening pressing into softened transfer cooling and near separating from film.
lens.org 参考文章(11)
Carl Martin Brock, Vapor degreaser process employing trichlorotrifluoroethane and ethanol ,(1973)
Koichi Wago, Gennady Gauzner, David Shiao-Min Kuo, Heat-transfer-stamp process for thermal imprint lithography ,(2002)
Carl E Picciotto, William M Tong, Jun Gao, Wei Wu, Imprint lithography apparatus and method employing an effective pressure ,(2005)
Stephen Robert Beaton, Craig William Walker, Wallace Anthony Martin, Ture Kindt-Larsen, Stephen Craig Pegram, Mold separation apparatus ,(1995)
W. Ehrley, R. Butz, S. Mantl, External infrared reflection absorption spectroscopy of methanol on an epitaxially grown Si(100)2 × 1 surface Surface Science. ,vol. 248, pp. 193- 200 ,(1991) , 10.1016/0039-6028(91)90072-Z
R.W. Jaszewski, H. Schift, J. Gobrecht, P. Smith, Hot embossing in polymers as a direct way to pattern resist Microelectronic Engineering. ,vol. 41, pp. 575- 578 ,(1998) , 10.1016/S0167-9317(98)00135-X
Dahl-Young Khang, Hong H. Lee, Room-temperature imprint lithography by solvent vapor treatment Applied Physics Letters. ,vol. 76, pp. 870- 872 ,(2000) , 10.1063/1.125613
Enoch King, Younan Xia, Xiao-Mei Zhao, George M. Whitesides, Solvent‐assisted microcontact molding: A convenient method for fabricating three‐dimensional structures on surfaces of polymers Advanced Materials. ,vol. 9, pp. 651- 654 ,(1997) , 10.1002/ADMA.19970090814
Jun-Ho Jeong, Young-Jae Shin, Eung-Sug Lee, Young-Suk Sim, Hyonkee Sohn, Kyung-Hyun Whang, Uv nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization ,(2003)
Donald P. Wyman, Condensation vapor degreaser ,(1990)