Hot embossing in polymers as a direct way to pattern resist
作者： R.W. Jaszewski , H. Schift , J. Gobrecht , P. Smith
DOI: 10.1016/S0167-9317(98)00135-X
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摘要: … In this work, we investigated the possibilities of Hot Embossing Lithography as a new nanoreplication technique. Different structures with feature sizes down to 50 nm were successfully …
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