Electromagnetic rebalanced micromechanical transducer

作者： Paul Grieff , Burton Boxenhorn

DOI: 10.1121/1.413252

关键词:

摘要: A method and apparatus for electromagnetically rebalancing a micromechanical transducer via plurality of current carrying electrodes disposed beneath or above the interacting with conductor on transducer. In first embodiment, comprises accelerometer having electromagnetic rebalance an asymmetric plate. alternative gyroscope driving outer gimbal sense gimbal.

参考文章(93)

Shmuel J. Merhav, Apparatus for measuring inertial specific force and angular rate of a moving body ,(1985)

Rex B. Peters, Pseudosinusoidal oscillator drive system ,(1987)

John R. Washburn, Control circuit for accelerometer ,(1980)

Richard Calvin Havens, Negative resistance high-q-microwave oscillator ,(1974)

Frank J Tressa, Signal cancellation system ,(1971)

Raymond G. Martin, Automatic phase and gain balance controller for a baseband processor ,(1977)

Gilles Delapierre, Process for the production of a piezoresistive gauge and to an accelerometer incorporating such a gauge ,(1987)

Ernest C. Wittke, Dynamic system analysis in a vibrating beam accelerometer ,(1985)

Hagen Kempas, Method of making dynamically tuned gimbal suspension ,(1986)

George A. Oberbeck, Apparatus for providing a displacement representative of the magnitude of a signal ,(1975)