Micro-electromechanical system (mems) carrier
作者： Ming-Ching Wu , Su-Jhen Lin
DOI:
关键词: Electromagnetic coil 、 Magnetic field 、 Silicon 、 Optoelectronics 、 Microelectromechanical systems 、 Substrate (printing) 、 Lorentz force 、 Engineering 、 Magnet 、 Electrical conductor 、 Electrical engineering
摘要: A micro-electromechanical system (MEMS) carrier formed by a typical surface micro-machining and bulk process on silicon substrate, having frame, movable element, conductive coil, two return springs pair of permanent magnets. The element is within the frame along path, coil or embedded in element. are between thereby connecting to providing force magnets magnetic field for co-acting with generating an electromagnetic Lorentz drive move against springs.
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