COUPLING STRUCTURE FOR OPTICAL WAVEGUIDE AND OPTICAL SEMICONDUCTOR ELEMENT OF WAVEGUIDE TYPE OPTICAL DEVICE

摘要: PURPOSE:To provide the structure for coupling both of an optical waveguide formed on a substrate and semiconductor element with high efficiency type device constituted by optically directly to end face substrate. CONSTITUTION:Three layers thin films having nearly same refractive index as core part 4 are interposed between 2. The respective forming second film 6 down lower than after packaging 2 substrate, then first 7 higher third 8 in upper thereof. described above is made smaller so be tapered 12 ward within plane parallel thereof cylindrical shape axis perpendicular exit light from confined perpendicularly three-layered waveguide. spreading direction condensed at and, therefore, high-efficiency realized.