Sputtering targets and associated sputtering methods for forming hermetic barrier layers
作者： Shari Elizabeth Koval , Bruce Gardiner Aitken , Mark Alejandro Quesada
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摘要: A sputtering target comprises a low Tg glass or an oxide of copper tin. Such materials can be used to form mechanically-stable thin films that exhibit self-passivating phenomenon and which seal sensitive workpieces from exposure air moisture. Low may include phosphate glasses such as tin phosphates fluorophosphates, borate glasses, tellurite chalcogenide well combinations thereof.
lens.org 参考文章(10)
Jeffery M. Konopacki, Returnless fuel system module ,(2005)
Richard P. Vasquez, Passivation of high temperature superconductors nasa. ,(1990)
Victoria Ann Edwards, Mark Alejandro Quesada, Cynthia Baker Giroux, Wanda Janina Walczak, Shari Elizabeth Koval, Multi-laminate hermetic barriers and related structures and methods of hermetic sealing ,(2011)
Bruce Gardiner Aitken, James R. Lim, Prantik Mazumder, Mark Alejandro Quesada, Todd Parrish St. Clair, Barrier layer for thin film battery ,(2010)
Nobuo Tanaka, Koki Yano, Kazuyoshi Inoue, Oxide material and sputtering target ,(2006)
Shari Elizabeth Koval, Bruce Gardiner Aitken, Mark Alejandro Quesada, Durable tungsten-doped tin-fluorophosphate glasses ,(2007)
Shari Elizabeth Koval, Bruce Gardiner Aitken, Mark Alejandro Quesada, Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device ,(2009)
Gaylord L. Francis, Lauren K. Cornelius, Paul A. Tick, Sealing materials and glasses ,(1991)
Bruce Gardiner Aitken, Chong Pyung An, Mark Alejandro Quesada, Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device ,(2010)
Chong Pyung An, Mark Alejandro Quesada, Self-passivating mechanically stable hermetic thin film ,(2010)