Optical properties of CVD grown amorphous Ge-Sb-S thin films
作者： C.C. Huang , C.C. Wu , K. Knight , D.W. Hewak
DOI: 10.1016/J.JNONCRYSOL.2009.12.027
关键词:
摘要: … Schematic diagram of CVD system used for Ge–Sb–S thin film deposition. … Temperature plays a very important role for the deposition of Ge–Sb–S thin films by the CVD techniques we …
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