Developments in nanocrystal memory

作者: Ting-Chang Chang , Fu-Yen Jian , Shih-Cheng Chen , Yu-Ting Tsai

DOI: 10.1016/S1369-7021(11)70302-9

关键词:

摘要: Flash nonvolatile memory has been widely applied in portable electronic products. However, traditional flash is expected to reach physical limits as its dimensions are scaled down; the charges stored floating gate can leak out more easily through a thin tunneling oxide, causing serious reliability issue. In order solve this problem, discrete nanocrystal proposed and considered be promising candidate for next generation of memories due high operation speed, good scalability, superior reliability. This paper reviews current status research focuses on materials, fabrication, structures, treatment methods provide an in-depth perspective state-of-the-art memory.

参考文章(61)
Wei-Ren Chen, Ting-Chang Chang, Yen-Ting Hsieh, Simon M. Sze, Chun-Yen Chang, Formation of Ge nanocrystals using Si1.33Ge0.67O2 and Si2.67Ge1.33N2 film for nonvolatile memory application Applied Physics Letters. ,vol. 91, pp. 102106- ,(2007) , 10.1063/1.2779931
Jheng-Jie Huang, Po-Chun Yang, Shih-Ching Chen, Hui-Chun Huang, Der-Shin Gan, New-Jin Ho, Yi Shi, Ann-Kuo Chu, Enhanced retention characteristic of NiSi2/SiNx compound nanocrystal memory Applied Physics Letters. ,vol. 96, pp. 262107- ,(2010) , 10.1063/1.3457870
P. H. Yeh, H. H. Wu, C. H. Yu, L. J. Chen, P. T. Liu, C. H. Hsu, T. C. Chang, Fabrication of NiSi2 nanocrystals embedded in SiO2 with memory effect by oxidation of the amorphous Si∕Ni∕SiO2 structure Journal of Vacuum Science and Technology. ,vol. 23, pp. 851- 855 ,(2005) , 10.1116/1.1913678
Yan Zhu, Dengtao Zhao, Ruigang Li, Jianlin Liu, Self-aligned TiSi2∕Si heteronanocrystal nonvolatile memory Applied Physics Letters. ,vol. 88, pp. 103507- ,(2006) , 10.1063/1.2183815
S. Paul, C. Pearson, A. Molloy, M. A. Cousins, M. Green, S. Kolliopoulou, P. Dimitrakis, P. Normand, D. Tsoukalas, M. C. Petty, Langmuir−Blodgett Film Deposition of Metallic Nanoparticles and Their Application to Electronic Memory Structures Nano Letters. ,vol. 3, pp. 533- 536 ,(2003) , 10.1021/NL034008T
Shao-Ming Yang, Chao-Hsin Chien, Jiun-Jia Huang, Tan-Fu Lei, Nonvolatile Flash Memory Devices Using CeO2Nanocrystal Trapping Layer for Two-Bit per Cell Applications Japanese Journal of Applied Physics. ,vol. 46, pp. 3291- 3295 ,(2007) , 10.1143/JJAP.46.3291
A. Chandra, B. M. Clemens, Gold nanoparticles via alloy decomposition and their application to nonvolatile memory Applied Physics Letters. ,vol. 87, pp. 253113- ,(2005) , 10.1063/1.2149512
Shih-Cheng Chen, Ting-Chang Chang, Wei-Ren Chen, Yuan-Chun Lo, Kai-Ting Wu, SM Sze, Jason Chen, IH Liao, Fon-Shan Yeh, None, Influence of hydrogen plasma treatment on charge storage characteristics in high density tungsten nanocrystal nonvolatile memory Thin Solid Films. ,vol. 519, pp. 3897- 3901 ,(2011) , 10.1016/J.TSF.2011.01.259
Kwang Soo Seol, Seong Jae Choi, Jae-Young Choi, Eun-Joo Jang, Byung-Ki Kim, Sang-Jin Park, Dea-Gil Cha, In-Yong Song, Jong-Bong Park, Youngsoo Park, Suk-Ho Choi, Pd-nanocrystal-based nonvolatile memory structures with asymmetric SiO2∕HfO2 tunnel barrier Applied Physics Letters. ,vol. 89, pp. 083109- ,(2006) , 10.1063/1.2335677
Min-Chen Chen, Ting-Chang Chang, Sheng-Yao Huang, Kuan-Chang Chang, Hung-Wei Li, Shih-Ching Chen, Jin Lu, Yi Shi, A low-temperature method for improving the performance of sputter-deposited ZnO thin-film transistors with supercritical fluid Applied Physics Letters. ,vol. 94, pp. 162111- ,(2009) , 10.1063/1.3124658