Etching of Si(100) and (110) substrates in KOH solutions saturated and son-saturated with isopropyl alcohol

作者: M. Kramkowska , K. Rola , I. Zubel

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参考文章(2)
I. Zubel, M. Kramkowska, Etch rates and morphology of silicon (h k l) surfaces etched in KOH and KOH saturated with isopropanol solutions Sensors and Actuators A-physical. ,vol. 115, pp. 549- 556 ,(2004) , 10.1016/J.SNA.2003.11.010
Yohko F. Yano, Correlation between surface and bulk structures of alcohol-water mixtures. Journal of Colloid and Interface Science. ,vol. 284, pp. 255- 259 ,(2005) , 10.1016/J.JCIS.2004.09.059