作者: I. V. Tomov , T. Anderson , P. M. Rentzepis
DOI: 10.1063/1.107631
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摘要: An efficient scheme to generate picosecond seed pulses at 193 nm for amplification in ArF is described. The amplifier system operates a repetition rate of 300 Hz providing average output power 750 mW and pulse duration below 10 ps.