Effects of Al Diffusion Process on the Electrical, Optical, and Structural Properties of Transparent Conducting Al-doped ZnO
作者： Bhaskar Parida , Seonghoon Jeong , Hyunsoo Kim
DOI: 10.3938/JKPS.73.917
关键词:
摘要: The effects of post-thermal diffusion Al into heavily Al-doped ZnO (AZO) on its electrical, optical, and structural properties were investigated. Notably, the thermal led to a significant enhancement optical transmittance-e.g., transmittances at 550 nm 90.4% 96.7% before after diffusion, respectively. analysis revealed that improved transmittance was due combined crystallinity, smoother surface, presence transparent Al-O. However, electrical AZO films degraded-e.g., sheet resistance increased by 24% which might be attributed generation internal defects heavy doping.
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