Layered capacitor device
作者： Koen Emiel Jozef Appeltans , Jean Henri Pierre Louis Boxho , Damien Luc François Macq , Wim Andre Roger Vanderbauwhede
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摘要: A layered capacitor device with high capacitance per unit area is realized by alternating in the vertical direction first layers (FL 1 , FL 2 3 4 5 ) and second (SL SL ). layer consists of horizontally electrically conducting tracks (T 2,2 ; T 2,3 insulating tracks, whereas a includes material, e.g. an oxide. In this way top-bottom capacitors (C TB side-wall SW are constituted that parallel coupled to form device. preferred embodiment invention, coupling conductively interconnecting diagonally neighboring 1,2
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