Systems and methods for internal surface conditioning in plasma processing equipment
作者： Soonam Park , Yufei Zhu , Jiayin Huang , Edwin C. Suarez , Nitin K. Ingle
DOI:
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摘要: A method of conditioning internal surfaces a plasma source includes flowing first gases into generation cavity the that is enclosed at least in part by surfaces. Upon transmitting power cavity, ignite to form plasma, producing products, portions which adhere The further products out toward process chamber where workpiece processed second cavity. partially remove from
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