作者: Minghui Zhou , Xiaoli Liu , Baozhi Yu , Jing Cai , Chunyan Liao
DOI: 10.1016/J.APSUSC.2015.02.014
关键词:
摘要: … Then the substrates were used for Raman measurements directly using a confocal Raman … data evaluation software equipped in the Raman system. The Raman band of a silicon wafer …