Design of a FEM based simulator for MEMS devices
作者： Sridevi Gugulothu , Gaurav Kumar , Harshal B. Nemade , Gaurav Trivedi
DOI: 10.1109/TENCON.2017.8228127
关键词:
摘要: Micro-Electro-Mechanical-Systems (MEMS) devices and sensors play a vital role in many industrial commercial applications. Accurate efficient simulators are required for the design of these MEMS devices. However, existing either costly (commercial tools) or suffer from issues like accuracy inability to model complex geometries as case open source simulators. In this paper, 1D/2D framework is proposed which can simulate using Finite Element Method (FEM) discretization method. The simulator incorporate new mathematical models will enable industry academia Simulations static dynamic analysis microcantilever beam has been performed our simulator. results have validated with COMSOL having maximum error 0.1454 × 10−12 m 0.02206 10−6 excitation, respectively. outperformed speedup 2.18 10.71 analysis, used 7.19 less memory both cases.
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