The role of structural factor in In/sub 2/O/sub 3/ gas response
作者： A. Cornet , J. Morante , A. Cabot , J. Arbiol , V. Golovanov
DOI: 10.1109/ICSENS.2002.1037288
关键词:
摘要: In this paper we examined the influence of In/sub 2/O/sub 3/ film structure on their gas sensing characteristics. Films were deposited by spray pyrolysis from InCl/sub 3/-water solutions. Regularities a correlation between parameters and such structural as thickness, grain size, refraction index, texturing established. Some requirements for sensor, designed detection both reducing oxidizing gases, formulated well.
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