PREPARATION OF INDIUM OXIDE THIN FILM BY SPIN-COATING METHOD AND ITS GAS-SENSING PROPERTIES
作者： Wan-Young Chung , Go Sakai , Kengo Shimanoe , Norio Miura , Duk-Dong Lee
DOI: 10.1016/S0925-4005(98)00100-2
关键词:
摘要: … in this group of gas sensors, although that technology is indispensable for microfabrication of sensor devices. Up until now, most of the commercialized sensors are of a sintered block- …
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sci-hub.se 参考文章(4)
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