Vertical heat treatment apparatus

摘要: A vertical heat treatment apparatus includes a reaction furnace constituted by chamber having an inner tube and outer heater arranged outside the chamber, manifold communicating with lower portion of to support gas being supplied exhausted through mainfold, hollow vessel, together boat in furnace, for supporting end objects, plurality first heat-insulating members detachably wherein number insulating is adjusted adjust effect. The member fin unit fins horizontally at predetermined intervals spacers keeping between fins.