Vertical furnace for improving wafer uniformity
作者： Eddy Lay , Jen-Chung Chen , Sheng-Wei Wu , Shih-Min Tseng , Shih-Fang Chen
DOI:
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摘要: A vertical furnace includes a heat treatment tube, at least one reactive gas inlet, first adiabatic plates and second plates. The inlet is disposed or near bottom end of the tube. are stacked in each having flow channel structure for allowing to pass through, which all corners rounded. below
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