Analogy between electrical and structural properties of electron-beam-deposited SnO2

作者: M.H. Madhusudhana Reddy , S.R. Jawalekar , A.N. Chandorkar

DOI: 10.1016/0040-6090(90)90121-S

关键词:

摘要: The electrical properties of electron-beam-evaporated SnO2 films were studied under various evaporation and annealing conditions. These explained by correlating them with the structural prepared same long-term stability these was then sensor operating conditions to determine deposition for gas applications. From correlation experiments, it established that, because their superior properties, deposited at 25 350 °C more suitable applications than intermediate substrate temperatures.

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