作者: Rajesh Kumar , Atul Khanna , V.S. Sastry
DOI: 10.1016/J.VACUUM.2012.01.007
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摘要: Abstract SnO 2− x films were prepared by reactive thermal and e-beam evaporation of Sn on alumina substrates post deposition treatment. X-ray diffraction measurements found that are tin dioxide (SnO 2 ) phase with small amounts phase. The surface conductivity was measured in air presence H S, C 5 OH vapors at four sensor operating temperatures 433–493 K. resistance decreases exposure to S but shows no change hydrogen ethanol. response rise temperature while both recovery times improve. signal enhances increase resistivity coatings. Our experiments conclude film conductance is due chemical reaction between there little or role interaction gas molecules adsorbed charged oxygen species.