Interaction of reducing gases with tin oxide films prepared by reactive evaporation techniques

作者: Rajesh Kumar , Atul Khanna , V.S. Sastry

DOI: 10.1016/J.VACUUM.2012.01.007

关键词:

摘要: Abstract SnO 2− x films were prepared by reactive thermal and e-beam evaporation of Sn on alumina substrates post deposition treatment. X-ray diffraction measurements found that are tin dioxide (SnO 2 ) phase with small amounts phase. The surface conductivity was measured in air presence H S, C 5 OH vapors at four sensor operating temperatures 433–493 K. resistance decreases exposure to S but shows no change hydrogen ethanol. response rise temperature while both recovery times improve. signal enhances increase resistivity coatings. Our experiments conclude film conductance is due chemical reaction between there little or role interaction gas molecules adsorbed charged oxygen species.

参考文章(39)
Toshko G. Nenov, Stefcho P. Yordanov, Ceramic Sensors: Technology and Applications ,(1996)
Z. M. Jarzebski, J. P. Marton, Physical Properties of SnO2 Materials I . Preparation and Defect Structure Journal of The Electrochemical Society. ,vol. 123, ,(1976) , 10.1149/1.2133010
Z. M. Jarzebski, J. P. Morton, Physical Properties of SnO2 Materials: III . Optical Properties Journal of The Electrochemical Society. ,vol. 123, ,(1976) , 10.1149/1.2132647
R Ionescu, A Vancu, C Moise, A Tomescu, Role of water vapour in the interaction of SnO2 gas sensors with CO and CH4 Sensors and Actuators B-chemical. ,vol. 61, pp. 39- 42 ,(1999) , 10.1016/S0925-4005(99)00277-4
S. Semancik, R.E. Cavicchi, The growth of thin, epitaxial SnO2 films for gas sensing applications Thin Solid Films. ,vol. 206, pp. 81- 87 ,(1991) , 10.1016/0040-6090(91)90397-G
M.H. Madhusudhana Reddy, S.R. Jawalekar, A.N. Chandorkar, Analogy between electrical and structural properties of electron-beam-deposited SnO2 Thin Solid Films. ,vol. 187, pp. 171- 178 ,(1990) , 10.1016/0040-6090(90)90121-S
G. Eranna, B. C. Joshi, D. P. Runthala, R. P. Gupta, Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review Critical Reviews in Solid State and Materials Sciences. ,vol. 29, pp. 111- 188 ,(2004) , 10.1080/10408430490888977
M. de la L. Olvera, R. Asomoza, SnO2 and SnO2:Pt thin films used as gas sensors Sensors and Actuators B: Chemical. ,vol. 45, pp. 49- 53 ,(1997) , 10.1016/S0925-4005(97)00269-4
Wolfgang Göpel, Klaus Dieter Schierbaum, SnO2 sensors: current status and future prospects Sensors and Actuators B: Chemical. ,vol. 26, pp. 1- 12 ,(1995) , 10.1016/0925-4005(94)01546-T