TERNARY NITRIDE FILMS SYNTHESIZED BY CATHODIC ARC METHOD
作者： H. Hasegawa , M. Kawate , A.K. Hashimoto , T. Suzuki
DOI: 10.1016/B978-008044504-5/50090-8
关键词:
摘要: Changes in micro-structures and corresponding physical properties of ternary nitride films such as Ti 1-X Al X N, Cr Zr N were briefly summarized focused on micro-hardness with respect to different x value. The crystal structure lattice parameter change value their correspondingly well. In this paper, the maximum hardness particular was discussed based phase transition, analyzed by X-ray diffraction method transmission electron microscopy.
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