Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering
作者： U. Wahlström , L. Hultman , J.-E. Sundgren , F. Adibi , I. Petrov
DOI: 10.1016/0040-6090(93)90244-J
关键词: Wurtzite crystal structure 、 Mineralogy 、 Crystal growth 、 Crystallite 、 Materials science 、 Sputtering 、 Analytical chemistry 、 Selected area diffraction 、 Transmission electron microscopy 、 Sputter deposition 、 Microstructure
摘要: … The target-to-substrate distance was 125 mm and film … pole figures from NaCl-structure films with x = 0 and 0.18 while Fig. 3(c) is a (0002) pole figure from a wurtzite structure A1N film. …
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