Design, implementation and measurement of 26.6 GHz patch antenna using MEMS technology
作者： M. Abdel-Aziz , H. Ghali , H. Ragaie , H. Haddara , E. Larique
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摘要: The paper presents a 26.6 GHz patch antenna using MEMS technology. In this technology, the is suspended over thin dielectric layer (membrane), which deposited on high index silicon substrate. addition, substrate fully etched under patch, creating an air cavity region of very low constant (/spl epsiv//sub r//spl cong/1). directly fed microstrip line, and CPW-microstrip transition used for probe measurements return loss. design performed 3D electromagnetic simulator HFSS/sup /spl reg//. measured loss -17 dB at GHz, bandwidth 4.5%. has radiation efficiency 61.7% directivity 7.9 dB. cross-polarization level less than -20 in both E- H-planes.
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